Processes of micro- and nanotechnology

В. В. Витько, А. А. Семенов, П. Ю. Белявский, А. А. Никитин, И. Л. Мыльников, А. Л. Холкин

The main topics of practical lessons of the course “Processes of micro- and nanotechnology.” A brief description of the physical models of corpuscular interaction with a solid matter and analytical approach to the physical processes occurring deposition and etching of films as a result of ion-plasma sputtering. There is the design procedure of the technological modes of the film deposition process, which is based on recommendations for real processes. There is also necessary background information and characteristics of the elements for the calculation.

The textbook is intended for the education and training of master’s degree students in academics programs consider “Physical Electronics” and “Radiophotonics” 210100 — “Electronics and Microelectronics”. It can be useful to graduate students and researchers specializing in the field of ion-plasma technology for electronics and radiophotonics devices.